液晶与显示2017，Vol.32Issue(4)：269-274,6.DOI:10.3788/YJYXS20173204.0269
TFT-LCD Stage Mura的研究与改善
Research and improvement of TFT-LCD Stage Mura
肖洋 1周鹏 1闫润宝 1郑云友 1齐勤瑞 1魏崇喜 1章旭 1张然1
作者信息
- 1. 北京京东方显示技术有限公司,北京 100176
- 折叠
摘要
Abstract
The spotted and striped Mura on TFT-LCD Panel degraded product quality.The defect pattern matched the exposure stage by analyzing.It was found that the BM CD and Pixel Pitch are abnormal through researching the abnormal area characteristic parameter.Model analysis based on Stage Mura indicated that the bending of glass on stage shorted the Exposure gap,which shrank the Exposure area,and minified CD and formed transmittance difference.The bending of glass also shifted the Pixel Pitch,which resulted in light leak and Mura.The experiment showed that the difference of BM CD and Pixel Pitch were caused by Stage flatness,which could be improved by polishing stage and decreasing vacuum adsorption pressure.The light leak of Pixel Pitch could be also improved by extending CD.Finally,the CF BM stage Mura was improved greatly by CD increasing,stage polishing,and vacuum adsorption pressure decreasing,and the Stage Mura defect ratio decreased from 10.5％ to 0.11％.关键词
薄膜晶体管液晶显示器/色斑/线宽/像素间距Key words
TFT-LCD/Mura/CD/pixel pitch分类
信息技术与安全科学引用本文复制引用
肖洋,周鹏,闫润宝,郑云友,齐勤瑞,魏崇喜,章旭,张然..TFT-LCD Stage Mura的研究与改善[J].液晶与显示,2017,32(4):269-274,6.
