传感技术学报2017，Vol.30Issue(4)：496-499,4.DOI:10.3969/j.issn.1004-1699.2017.04.002
氧化锡气敏薄膜的喷墨打印技术研究
Study OnInk-Jet Printing Technology of Tin Oxide Gas Sensitive Film
摘要
Abstract
Ink-jet printing technology works in the room temperature without mask graphical and operates conveniently.Ink-jet printing technology is used in the micro-hotplate gas sensor for printing SnO2 thin film.Printing pattern is designed according to the positioning precision of the printer and the suspended structure size of the MHP.The target thickness determined the numbers of printing layer and drying process parameters after printing are studied.The structure and characteristic of the SnO2 thin film on MHP are determined by scanning electron microscopy(SEM).The sensitive thin-film surface is smooth and uniform.Furthermore,sensing properties of the sensor are investigated.The results show that at 250 ℃ the sensor is quite sensitive to ethanol,the lowest concentration of ethanol that could be detected is 0.5×10-6,and the response time and recovery time are both shorter than 3 seconds.关键词
喷墨打印/气体传感器/微热板/气敏薄膜Key words
ink-jet printing technology/gas sensor/MHP/gas-sensing films分类
信息技术与安全科学引用本文复制引用
杨英花,余隽,吴昊,李中洲,唐祯安..氧化锡气敏薄膜的喷墨打印技术研究[J].传感技术学报,2017,30(4):496-499,4.基金项目
硅基纳米多级复合结构集成气体传感器项目(61131004) （61131004）
基于形变在线调控技术研究微热板气体传感器在应力作用下的稳定性和可靠性项目(61274076) （61274076）
中国工程物理研究院科学技术发展基项目(2012A0403018) （2012A0403018）
