传感技术学报2017，Vol.30Issue(4)：592-595,4.DOI:10.3969/j.issn.1004-1699.2017.04.019
基于LTCC的无线无源双参数传感器
A Wireless Passive Bi-Parameters Sensor Based on LTCC Technology
摘要
Abstract
A wireless passive bi-parameter sensor based on low temperature co-fired ceramic(LTCC)technology is designed.Two LC(inductor-capacitor)resonant circuits are integrated on the sensor substrate,which are based on the LC resonant theory.The two capacitances are sensitive to the pressure and temperature parameters respectively.The two inductors are arranged in a coaxial arrangement with a special winding method to reduce the mutual inductance between them.A compound test platform of temperature and pressure is set up to do the related tests of the sensor.The maximum test temperature is 300 ℃.The temperature sensitivity of the sensor is-14.27 kHz/℃,and the pressure sensitivity is-13.75 kHz/kPa.The results show that this design can significantly reduce the mutual interference between the two parameters.关键词
无线无源/双参数/LC传感器/LTCC/互感串扰Key words
wireless passive/bi-parameter/LC sensor/LTCC/lumped circuit/mutual interference分类
信息技术与安全科学引用本文复制引用
唐顺,王海星,谭秋林,宋瑞佳,伍国柱,熊继军..基于LTCC的无线无源双参数传感器[J].传感技术学报,2017,30(4):592-595,4.基金项目
国家自然科学基金项目(61471324,51425505) （61471324,51425505）
山西省青年拔尖人才支持计划项目 （）
