传感技术学报2017，Vol.30Issue(4)：618-622,5.DOI:10.3969/j.issn.1004-1699.2017.04.023
一种新型宽氧阈低功耗氢气传感器系统的研制
The Development of a Novel Hydrogen Sensor System with Wide-Oxygen Threshold and Low Power Consumption
摘要
Abstract
A multi-channel hydrogen sensor based on MEMS technology is designed and developed.The sensor signal collection,storage,processing and data analysis were completed by using laboratory virtual instrument engineering workbench(LabVIEW).Six kinds of noble metal doped metal oxide including both n-type semiconductor and p-type semiconductor were used as hydrogen-sensing materials.The sensor integrated heating,measurement and sensing taking planar photolithographic technology and silicon micromachining technology,and its power consumed less than 20 mW.The sensor operating in the air or hypoxia environment could detect hydrogen concentration range of 0~1%,which is expected to be widely used in the field of aerospace,national defense,and public security.关键词
宽氧阈/低功耗/氢气传感器/MEMS技术/LabVIEWKey words
wide-oxygen threshold/low power consumption/hydrogen sensor/MEMS technology/LabVIEW分类
通用工业技术引用本文复制引用
杨芳,刘琦,王新锋,官德斌..一种新型宽氧阈低功耗氢气传感器系统的研制[J].传感技术学报,2017,30(4):618-622,5.基金项目
国家自然科学基金项目(51402269) （51402269）
