测控技术2017，Vol.36Issue(4)：113-116,4.
硅-蓝宝石压力传感器温度补偿研究
Research on Temperature Compensation of Silicon on Sapphire Pressure Sensor
摘要
Abstract
In order to solve the problem that the silicon on sapphire (SOS) pressure sensor is easily affected by temperature in the process of measurement,the temperature compensation method based on series and parallel constant resistances and piecewise interpolation algorithm is proposed.The principle and realization of compensation method are discussed from two aspects of hardware compensation circuit and software compensation algorithm,and the feasibility of this method is verified by experiments.Finally,the maximum relative error of the SOS pressure sensor is 0.357％,and the integrated error is less than 0.129％.关键词
高温/硅蓝宝石/压力传感器/温度补偿Key words
high temperature/silicon on sapphire/pressure sensor/temperature compensation分类
信息技术与安全科学引用本文复制引用
卢超,黄漫国,李欣,郭占社..硅-蓝宝石压力传感器温度补偿研究[J].测控技术,2017,36(4):113-116,4.基金项目
航空科学基金(20153451023) （20153451023）
中航工业技术创新基金(2013F63447R) （2013F63447R）
