激光技术2017，Vol.41Issue(3)：367-375,9.DOI:10.7510/jgjs.issn.1001-3806.2017.03.013
SOI纳米光波导表面粗糙度的研究进展
Research progress of surface roughness of silicon-on-insulator nano-optical waveguide
摘要
Abstract
Surface roughness of silicon-on-insulator(SOI)nano-optical waveguide can significantly increase scattering loss.It is one of the problems to be solved urgently in different application fields.Firstly,the concept of surface roughness and the progress of theoretical research of surface scattering loss were introduced.Secondly,various advanced measurement methods of surface roughness of SOI nano-optical waveguide,including the problems existing in the characterization of surface topography,were reviewed.Thirdly,several kinds of surface smoothing processes were also introduced.Finally,some conclusions were presented combined with our study.关键词
集成光学/光波导/表面粗糙度/散射损耗Key words
integrated optics/optical waveguide/surface roughness/scattering loss分类
信息技术与安全科学引用本文复制引用
张辉,桑胜波,菅傲群,段倩倩,张文栋..SOI纳米光波导表面粗糙度的研究进展[J].激光技术,2017,41(3):367-375,9.基金项目
国家自然科学基金资助项目(61471255 （）
61474079 （）
61501316 （）
51505324) （）
国家八六三高技术研究发展计划资助项目(2015AA042601) （2015AA042601）
教育部博士点基金资助项目(20131402110013) （20131402110013）
山西省青年基金资助项目(2014021023-3) （2014021023-3）
