激光技术2017，Vol.41Issue(3)：433-437,5.DOI:10.7510/jgjs.issn.1001-3806.2017.03.025
激光辐照CCD温度场与热应力场的研究
Research of temperature field and thermal stress field of CCD under laser irradiation
张帆 1牛燕雄 1刘宁 1梁振江 1刘帅1
作者信息
- 1. 北京航空航天大学 仪器科学与光电工程学院,北京 100191
- 折叠
摘要
Abstract
In order to study interaction process and damage mechanism between laser and CCD sensors,an interline transfer surface array CCD irradiated by 1.06μm CW laser was analyzed and simulated by means of finite element analysis.Thermal coupling model was established by using laser irradiation area of substrate Si surface as heat source.The temperature distribution and thermal stress distribution of CCD were simulated.By comparing and analyzing temperature damage and stress damage of the components,it was found that stress damage was prior to temperature damage.The results show that as the convergence of the fixed boundary and the free boundary,the thermal stress at the edge of the lower surface of the base Si is the first to exceed the damage threshold of 120MPa at the time of laser action of 0.1s,and stress failure occurs.Si material slips from the lower surface edge to the center,and the substrate is gradually out of fix.At the time of laser action of 0.3s,stress failure occurs to Al film and SiO2 film and Al film strips radically from the inside to the outside due to thermal stress over the adhesion strength of 100MPa,finally the CCD is out of work position and fails.The research achievements provide theoretical basis for laser damage and protection of CCD sensors.关键词
激光物理/激光破坏/温度场/热应力场/CCDKey words
laser physics/laser damage/temperature field/thermal stress field/CCD分类
数理科学引用本文复制引用
张帆,牛燕雄,刘宁,梁振江,刘帅..激光辐照CCD温度场与热应力场的研究[J].激光技术,2017,41(3):433-437,5.
