现代应用物理2017，Vol.8Issue(1)：67-75,9.DOI:10.12061/j.issn.2095-6223.2017.010801
基于鼓包法的PbZr0.52Ti0.48O3/Ni薄膜材料力电磁耦合特性测试分析
Testing and Analysis of Mechanical-Electrical-Magnetic CouplingCharacteristics of PbZr0.52Ti0.48O3/Ni Thin Film Based on Bulge Test Method
摘要
Abstract
PZT and PZT/Ni thin film materials were prepared by sol-gel method, ion beam magnetron sputtering method,and chemical etching method.Mechanical-electrical-magnetic properties of PZT/Ni film were measured by self-developed bugle test system.The structure of PZT/Ni film was examined by XRD.It was found that the elastic modulus of PZT film firstly increased and then gradually decreased with the increasing of applied electric field.The corresponding magnetic coercive field increased of 33.4%.With the increase of the oil pressure, the residual polarization and coercive field of PZT thin films increased of 17.1% and 32.1%,respectively.The magnetic coercivity field of PZT/Ni composite films increased of 46.1%.关键词
PZT/Ni/鼓包法/多场耦合/弹性模量/矫顽场Key words
PZT/Ni/bulge test/multi-field coupling/elastic modulus/coercivity field分类
数理科学引用本文复制引用
刘奇,孙长振,何元东,徐浩,于泽军,毛卫国,裴永茂,方岱宁..基于鼓包法的PbZr0.52Ti0.48O3/Ni薄膜材料力电磁耦合特性测试分析[J].现代应用物理,2017,8(1):67-75,9.基金项目
国家自然科学基金资助面上项目(11272276) （11272276）
湖南省自然科学基金杰出青年基金资助项目(14JJ1020) （14JJ1020）
