材料工程2017，Vol.45Issue(4)：70-76,7.DOI:10.11868/j.issn.1001-4381.2015.001040
Si含量对VAlSiN涂层微结构、力学性能和摩擦磨损性能的影响
Influence of Si Content on Microstructure, Mechanical Properties and Tribological Properties of VAlSiN Coatings
摘要
Abstract
VAlSiN coatings with different Si contents were deposited at 300℃ by reactive magnetron sputtering.The effect of Si content on the microstructure, growth morphology,chemical state, mechanical properties,friction and wear properties was investigated.The results show that the VAlN coating exhibits a single-phase NaCl structure with (111) preferred orientation.The VAlSiN coatings gradually lose their structure of (111) preferred orientation and transfer into amorphous structure with the increase of Si content.The VAlSiN coatings which Si content is more than 1.8% (atom fraction,same as below) are multi-phase composite coatings consisting of nc-VAlN and a-Si3N4.Compared to VAlN coating, the density of VAlSiN coatings with small amount of Si (0.8%) is increased significantly as well as the hardness that reaches 30.1GPa,while the grain size is decreased.Further increasing Si content, the growth of columnar grains is interrupted, concomitant of the hardness gradually declines and tends to be stable at 22GPa.The friction coefficient of the VAlSiN coatings decreases first and then increases with the increase of Si content.The wear rate reaches the lowest value of 1.2×10-16 m3·N-1·m-1 is obtained when Si content is 0.8%.关键词
磁控溅射/VAlSiN涂层/微结构/硬度/摩擦磨损性能Key words
magnetron sputtering/VAlSiN coating/microstructure/hardness/tribological property分类
矿业与冶金引用本文复制引用
王恩青,岳建岭,李淼磊,李栋,黄峰..Si含量对VAlSiN涂层微结构、力学性能和摩擦磨损性能的影响[J].材料工程,2017,45(4):70-76,7.基金项目
国家自然科学基金项目(51201187) （51201187）
