硅酸盐通报2017，Vol.36Issue(4)：1401-1405,5.
热源并联式全透气碳化硅合成炉的模拟分析
Simulation and Analysis on the Heat Source in Parallel and Breathe Freely Furnace
摘要
Abstract
Structure character and the radical theory of the technology on SiC synthesis by means of new designed furnace were introduced.The variation of temperature and pressure field were studied,simulation and experiment results were comparatively analyzed.The results show that the heat source in parallel and breathe freely furnace can Increase the reaction area.Pressure in furnace maintain between 0.101 and 0.113 MPa.The CO gas can be taken out from the exhaust system smoothly.The maximum velocity of gas in no more than 0.6 m/s,so it can effectively prevent the spray accident and toxic gases harm to personnel,the density of synthetic products has improved significantly.关键词
热源并联/全透气/碳化硅/数值模拟Key words
heat source in parallel/full ventilation/silicon carbide/numerical simulation分类
化学化工引用本文复制引用
徐保海,王晓刚,李阳,吴泽民,任小雷,段晓波..热源并联式全透气碳化硅合成炉的模拟分析[J].硅酸盐通报,2017,36(4):1401-1405,5.基金项目
国家自然科学基金(51074123) （51074123）
