中北大学学报（自然科学版）2017，Vol.38Issue(2)：225-230,6.DOI:10.3969/j.issn.1673-3193.2017.02.023
纳米光栅微陀螺噪声分辨率分析
Noise Resolution Analysis of Micro-Gyroscope Based on Nano-Gratings
摘要
Abstract
Aiming at the problem that the noise resolution of the existing micro-mechanical gyroscope was difficult to be reduced,a micro-gyroscope based on nano-gratings was designed.The working principle of micro-gyroscope based on nano-gratings was described,the dynamic equations of micro-gyroscope were analyzed,and the micro-gyroscope structure was designed.The sensitivity of micro-gyroscope was 21.27 nm/°/s.The nano-gratings structure designed for micro-gyroscope was designed with a diffraction sensitivity of 0.001 75 mW/nm.The sensitivity of micro-gyroscope based on nano-gratings was simulated in SIMULINK.The sensitivity of micro-gyroscope based on nano-gratings was 37 mV/°/s.The results show that the noise resolution of micro-gyroscope based on nano-gratings is 2.903× 10-4/h/√Hz.关键词
纳米光栅/微陀螺/动力学/灵敏度/噪声分辨率Key words
nano-gratings/micro-gyroscope/dynamic/sensitivity/noiseresolution分类
信息技术与安全科学引用本文复制引用
王宾,李孟委,吴倩楠,耿浩,王高..纳米光栅微陀螺噪声分辨率分析[J].中北大学学报（自然科学版）,2017,38(2):225-230,6.基金项目
国家自然基金面上资助项目(61573323) （61573323）
