人工晶体学报2017，Vol.46Issue(4)：682-687,6.
合成CVD金刚石涂层用硬质合金基体预处理工艺优化研究
Pretreatment Process Optimization of Carbide Matrix Used for CVD Diamond Coatings
摘要
Abstract
Diamond coatings were synthesized on the cemented carbide substrates of WC-6wt%Co pretreated by two-step and three-step pretreatments in CH3COCH3/H2 ambient adopt hot filament chemical vapor deposition.The WC-6wt%Co substrates pretreated were tested by scanning electron microscopy (SEM) and energy dispersive spectrometer (EDS) to analyze the surface morphologies and cobalt content of WC-6wt%Co substrates.The optimum of three-step pretreatment was obtained thorough the comparison of pretreatment results between two-step and three-step pretreatment.surface morphology, crystalline property, adhesion between films and WC-6wt%Co substrates of diamond coatings were analyzed by SEM,X-ray diffraction (XRD) and hardness tester.关键词
化学气相沉积/金刚石涂层/表面预处理/工艺优化/硬质合金基体Key words
chemical vapor deposition/diamond coatings/surface pretreatment/process optimization/cemented carbide substrate分类
化学化工引用本文复制引用
许晨阳,解亚娟,邓福铭,陈立,雷青..合成CVD金刚石涂层用硬质合金基体预处理工艺优化研究[J].人工晶体学报,2017,46(4):682-687,6.基金项目
国家自然科学基金(51172278) （51172278）
北京市自然科学基金(15L00025) （15L00025）
北京教委科技成果转化项目(2010-583) （2010-583）
