厦门大学学报（自然科学版）2017，Vol.56Issue(3)：410-415,6.DOI:10.6043/j.issn.0438-0479.201611035
SiO2微盘腔的湿法腐蚀工艺研究
Research on Silica Microdisk by Wet-etching
摘要
Abstract
The whispering gallery mode (WGM) optical resonator enjoys advantages of high Q factor and small mode volume.The research on cavity quantum electrodynamics,biosensors,filters and nonlinear optics faces a very promising prospect.The microstructures of silica microdisk with different diameters(20,40,60 μm) were obtained by thermal oxidation,photolithography,magnetron sputtering,HF wet etching and KOH solution wet etching.The silicon backbone was octagonal pyramid,yielding smaller connection area with top silica microdisk and weaker inference on WGM in it.The surface of silica microdisk was also characterized by Atomic Force Microscopy.The surface of silica was smooth,and the Root-Mean-Square (RMS) roughness was 0.469 nm.The Q factor and FSR of 60 μm microdisk are 1 × 104 and 9.6 nm.关键词
回音壁/KOH溶液/微盘腔/自由光谱范围/Q值Key words
whispering gallery/KOH/microdisk/FSR/Q factor分类
信息技术与安全科学引用本文复制引用
杨文,龙浩,郭长磊,江水森,张保平,蔡志平,应磊莹..SiO2微盘腔的湿法腐蚀工艺研究[J].厦门大学学报（自然科学版）,2017,56(3):410-415,6.基金项目
中航工业产学研项目(CXY2011XD24) （CXY2011XD24）
中国博士后科学基金(2015M582041) （2015M582041）
