光学精密工程2017，Vol.25Issue(4)：813-819,7.DOI:10.3788/OPE.20172504.0813
大口径非球面反射镜误差分离组合加工技术
Fabrication of large aspheric mirror using multi-mode polishing based on error separation
摘要
Abstract
In order to improve material removal efficiency and error map convergence efficiency of large aspheric mirror, a multi-mode technique was introduced based on the separation of high and low order errors.First, the effect of tool size on period of surface error was analyzed.Then the convergence efficiency and dwell time between small and big polishing heads were compared.According to the error features during the fabrication process of large aspheric mirror, the surface error map was divided to low-order and high-order frequency errors.The dwell time of different tools was calculated.Accordingly multi-mode polishing strategy was employed in terms of the low order and high order errors, thus improving the processing efficiency.A large aspheric mirror with the aperture of 2.04 m was polished by the multi-mode technique.The result shows that the convergence rate is 61.2% in a single polishing circle.The low-order and high-order frequency errors are well removed, and the material removal efficiency and error map convergence efficiency are improved.Good processing results are achieved, which meet the demand of fabrication.关键词
光学加工/误差分离/组合加工/高阶误差/低阶误差Key words
optical fabrication/error separation/multi-mode polishing/low order error/high order error分类
矿业与冶金引用本文复制引用
刘振宇,李龙响,曾雪峰,罗霄,张学军..大口径非球面反射镜误差分离组合加工技术[J].光学精密工程,2017,25(4):813-819,7.基金项目
国家自然科学基金重点项目(No.61036015) （No.61036015）
国家自然科学基金青年科学基金资助项目(No.61605202) （No.61605202）
