光学精密工程2017，Vol.25Issue(4)：820-826,7.DOI:10.3788/OPE.20172504.0820
采用相位调制方法的光纤干涉仪
Fiber interferometer based on phase generated carrier method
摘要
Abstract
In order to realize compact and flexible wide-range displacement measurement, a fiber interferometer with the Phase Generated Carrier(PGC) method was proposed.First, the PGC method was detailed.The analysis on the internal and external modulations revealed the limitation of internal modulation and indicated that the external modulation was more suitable for wide-range displacement measurement.Then, two existing displacement calculation algorithms were analyzed by mathematical deduction and MATLAB simulation, proving that PGC-ATAN algorithm is better than PGC-DCM algorithm in millimeter-scale displacement measurement.A fiber interferometer based on the PGC method was established and tested experimentally.The results indicate that compared to PGC-DCM algorithm, PGC-ATAN algorithm is a better candidate for millimeter-scale displacement measurement.The maximum relative error of the interferometer in a millimeter-scale step motion is 255.21 nm with a standard deviation of 78.56 nm.It can satisfy the system requirements of high-precision and wide-range in displacement measurements.关键词
光纤干涉仪/相位调制方法/相位调制/位移解算/反正切法Key words
fiber interferometer/Phase Generated Carrier(PGC)/phase modulation/displacement calculation/arc-tangent method分类
数理科学引用本文复制引用
倪畅,张鸣,朱煜..采用相位调制方法的光纤干涉仪[J].光学精密工程,2017,25(4):820-826,7.基金项目
国家自然科学基金资助项目(No.51677104) （No.51677104）
