光学精密工程2017，Vol.25Issue(4)：850-856,7.DOI:10.3788/OPE.20172504.0850
相变区纳米硅氧薄膜的微观结构及光学特性
Microstructure and optical characteristics of nanocrystalline silicon oxide film in phase transformation zone
摘要
Abstract
A series of nc-SiOx∶H films were prepared by Very High Frequency Plasma Enhanced Chemical Vapor Deposition (VHF-PECVD), for the properties study of nanocrystalline silicon oxide films in silicon heterojunction solar cells.The microstructure, bonding configuration, band characteristics and photoluminescence properties of the films were characterized by Raman scattering spectra (Raman), Fourier transform infrared spectra (FTIR), UV-VIs transmission spectra and steady/transient state photoluminescence spectra (PL), respectively.Raman analysis shows that the film structure changes from microcrystalline to amorphous with the increasing of oxygen content.The films proves to have better ordered and denser structure in the phase transformation zone, where the crystallization degree is about 10% and nc-Si particles is about 3 nm.The steady/transient photoluminescence (PL) analysis shows that certain amount of oxygen could passivate defects, thus enhancing the photoluminescence.The highest luminescence intensity was achieved in the phase transformation zone.It indicated that stronger quantum confinement effect PL induced by the smaller nc-Si particles should be the main carrier recombination mechanism.关键词
纳米硅氧薄膜/相变区/微观结构/光致发光/量子限制效应Key words
nc-SiOx film/phase transformation zone/microstructure/photoluminescence(PL)/quantum confinement effect分类
信息技术与安全科学引用本文复制引用
李晓苇,李云,郑燕,高东泽,于威..相变区纳米硅氧薄膜的微观结构及光学特性[J].光学精密工程,2017,25(4):850-856,7.基金项目
国家自然科学基金青年基金资助项目(No.61504036) （No.61504036）
河北省自然科学基金青年基金资助项目(No.A2016201087) （No.A2016201087）
河北省高等学校科学研究指导项目(No.Z2015121) （No.Z2015121）
河北省科技计划项目(No.13214315) （No.13214315）
教育部博士点基金项目(No.20131301120003) （No.20131301120003）
河北省高等学校科技研究项目(No.QN20131115) （No.QN20131115）
