光学精密工程2017，Vol.25Issue(4)：875-883,9.DOI:10.3788/OPE.20172504.0875
彩色共焦系统可调制色散物镜设计
Design of adjustable dispersive objective lens for chromatic confocal system
摘要
Abstract
Aiming at the adjustment of measuring range and resolution in Chromatic Confocal Microscopy (CCM), a dispersive objective for chromatic confocal system was designed, which can realize chromatic dispersion and focusing function separately.The chromatic dispersion was achieved through a dispersion tube lens, which was composed of pure spherical refraction lens.The focusing function was accomplished by a commercial objective lens.The structure, material and aberrations of the dispersive tube lens were designed and optimized by ZEMAX software.The simulation shows that the axial linear chromatic dispersion is better than 230 mm in visible waveband.Moreover the axial linear dispersion range of the finished tube lens can be up to 160 mm.The dispersion characteristics of the tube lens combined with different focusing objective lenses were determined experimentally.The results show that the axial dispersion region with high linearity can be maintained in the case of different focusing objective lens.With commercial objective lens of 4x and 10x magnification, the measurement ranges of 1 300 μm and 225 μm are obtained with axial resolution of 2 μm and 0.4 μm respectively.Thus, the modulation of measurement range and resolution is achieved.关键词
表面形貌检测/彩色共聚焦/色散物镜/轴向色散/轴向分辨率Key words
surface topography detection/chromatic confocal/dispersive objective/axial dispersion/axial resolution分类
信息技术与安全科学引用本文复制引用
崔长彩,李煌,余卿,叶瑞芳..彩色共焦系统可调制色散物镜设计[J].光学精密工程,2017,25(4):875-883,9.基金项目
福建省科技计划项目-对外合作项目(No.2015I0004) （No.2015I0004）
厦门市科技计划项目-对台科技合作项目(No.3502Z20151232) （No.3502Z20151232）
大连理工大学精密与特种加工教育部重点实验室研究基金资助项目(No.JMTZ201503) （No.JMTZ201503）
