红外与毫米波学报2017，Vol.36Issue(2)：144-148,5.DOI:10.11972/j.issn.1001-9014.2017.02.004
不同离子比的锰钴镍薄膜材料结构和电学性能
Effect of cation ratio on structural and electrical properties of MnxCoyNi3-x-yO4 thin films
摘要
Abstract
Thin films of Mn-Co-Ni-O (MCNO) with different cation ratios were deposited by the magnetron sputtering method.By analyzing the material structure,it can be found that the grain size grows gradually with increasing Co cation number with constant Mn cation number,while the lattice parameter grows first and then decreases.The preferential orientation of thin films changes from (311) plane to (400) plane with increasing Mn cation number and the properties of thin films are unstable when the Co cation number is constant.The electrical properties show that both of Mn cations and Co cations participate in the conductivity,and Mn1.2Co1.5Ni0.3O4 has the lowest resistivity (235 Ω · cm) as well as the highest negative temperature coefficient of resistance (NTCR) | α295 | (4.7 ％ · K-1) at room temperature.关键词
MCNO薄膜/电学特性/电阻率/激活能Key words
MCNO thin films/electrical properties/resistivity/activation energy分类
信息技术与安全科学引用本文复制引用
张飞,吴敬,欧阳程,周炜,高艳卿,黄志明..不同离子比的锰钴镍薄膜材料结构和电学性能[J].红外与毫米波学报,2017,36(2):144-148,5.基金项目
Supproted by Shanghai project(15ZR1445700),SITP Innovation seed fund,and National Natural Science foundation of China (61274138,11304336) （15ZR1445700）
