红外与毫米波学报2017，Vol.36Issue(2)：149-153,5.DOI:10.11972/j.issn.1001-9014.2017.02.005
中红外硅微透镜阵列的离焦效应
Focal shift of silicon microlens array in mid-infrared regime
摘要
Abstract
In this study rigorous numerical model was utilized to characterize the focal shift of the diffractive midinfrared (MIR) silicon microlens arrays (MLAs) with the critical size smaller than the working wavelength.We found a more pronounced focal shift in mid-infrared wavelength which is out of the range predicted by existing models.Focal properties of the MLAs were also measured experimentally.The results agrees well with the simulation results.Our results provide a reference point in understanding the focal shift in MIR regime,which is important in terms of deciding the focal length of micro-nano lens systems,especially when dealing with the integration of diffractive devices in infrared optical system.关键词
亚波长结构/FDTD/红外探测器/离焦/微透镜阵列Key words
sub-wavelength structure/FDTD/infrared detector/focal shift/microlens array分类
信息技术与安全科学引用本文复制引用
左海杰,杨文,张江勇,应磊莹,张保平,侯治锦,陈洪许,司俊杰..中红外硅微透镜阵列的离焦效应[J].红外与毫米波学报,2017,36(2):149-153,5.基金项目
Supported by Special Project on the Integration of Industry,Education and Research of Aviation Industry Corporation of China (CXY2011XD24) （CXY2011XD24）
