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替代衬底上的碲镉汞长波器件暗电流机理

赵真典 何力 陈路 傅祥良 王伟强 沈川 张彬 卜顺栋 王高 杨凤

红外与毫米波学报2017,Vol.36Issue(2):186-190,5.
红外与毫米波学报2017,Vol.36Issue(2):186-190,5.DOI:10.11972/j.issn.1001-9014.2017.02.010

替代衬底上的碲镉汞长波器件暗电流机理

Dark current mechanism in long-wavelength HgCdTe infrared detectors on alternative substrates

赵真典 1何力 2陈路 1傅祥良 1王伟强 1沈川 1张彬 1卜顺栋 1王高 1杨凤1

作者信息

  • 1. 中国科学院上海技术物理研究所材料与器件中心,上海200083
  • 2. 中国科学院大学,北京100049
  • 折叠

摘要

Abstract

The dark current characteristics of long-wavelength HgCdTe were analyzed for three types of devices.By Ⅰ-Ⅴ measurement under different temperatures,the dominant dark currents of each device were clarified at different temperatures.It is demonstrated that the dark current of B +-implanted n +-onp planar junction on silicon substrate is comparable with that on bulk cadmium zinc telluride (CdZnTe) substrate above 80 K.However,the trap-assisted tunneling current becomes dominant below 80 K due to the high density of dislocations.Compared with n +-on-p junctions,the p +-on-n double-layer heterojunction inhibits the diffusion current effectively,which is good matched with the calculation result with the parameters,derived from Ⅰ-Ⅴ curve fitting.This p +-on-n diode has a R0A value of 38 Ω · cm2 at 80 K,for the cut-off wavelength of 9.6 μm,while that of the n +-on-p diode on bulk CdZnTe is 2.5 Ω · cm2.Below 60 K,the dislocations make the R0A value of the p +-on-n diode an order of magnitude lower than that of the n +-on-p diode on CdZnTe.

关键词

碲镉汞/红外焦平面/长波/替代衬底/暗电流

Key words

HgCdTe/infrared focal plane arrays/long wavelength/alternative substrate/dark current

分类

数理科学

引用本文复制引用

赵真典,何力,陈路,傅祥良,王伟强,沈川,张彬,卜顺栋,王高,杨凤..替代衬底上的碲镉汞长波器件暗电流机理[J].红外与毫米波学报,2017,36(2):186-190,5.

基金项目

国家自然科学基金(61306062)Supported by National Natural Science Foundation of China (61306062) (61306062)

红外与毫米波学报

OA北大核心CSCDCSTPCDSCI

1001-9014

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