液晶与显示2017，Vol.32Issue(5)：339-343,5.DOI:10.3788/YJYXS20173205.0339
高性能钆铝锌氧薄膜晶体管的制备
Fabrication of high performance Gadolinium-aluminum-zinc-oxide thin film transistors
摘要
Abstract
Because of the advantages in high mobility and low temperature process, oxide thin film transistor (TFT) becomes the hotspot in display technology at present.Gadolinium-aluminum-zinc-oxide (GdAZO) thin film and GdAZO TFT (active layer is GdAZO thin film) were fabricated.The photoluminescence spectra and the transmittance of GdAZO thin film demonstrate the application potential in transparent display.The transmission electron microscope image discovers the amorphous microstructure of the GdAZO thin film.The GdAZO TFTs manifests preferable transfer characteristics and output characteristics.The on-to-off current ratio is larger than 105, and the saturation mobility is about 10 cm2·V-1·s-1.The results imply that the GdAZO is a category of feasible candidate for oxide TFTs, besides, the GdAZO TFTs can serve as the drive devices in pixel circuits.关键词
钆铝锌氧/薄膜晶体管/有源层Key words
GdAZO/TFT/active layer分类
信息技术与安全科学引用本文复制引用
董俊辰,郁文,李慧津,韩德栋,张盛东,张兴,王漪..高性能钆铝锌氧薄膜晶体管的制备[J].液晶与显示,2017,32(5):339-343,5.基金项目
国家自然科学基金(No.61275025)Supported by National Natural Science Foundation of China(No.61275025) （No.61275025）
