中国机械工程2017，Vol.28Issue(9)：1016-1020,1028,6.DOI:10.3969/j.issn.1004-132X.2017.09.002
一种大工作空间密度的压电微动二维工作台设计
X-Y Micropositioning Piezostage Design with Large Workspace Density
摘要
Abstract
Aiming at the problems of small microstage workspace density,a kind of 2-DOF sym-metrical parallel microstage was put forward herein.First,the main deformation factors were analyzed in the displacement amplifier;second,the stiffnesses of circular flexible hinge,parallel plate flexible hinge and corner-filleted flexible hinge were calculated;third,the energy method and the displace-ment matrix were utilized to get the output force formula of parallelogram displacement amplifier, displacement formula of the stage movement;finally,the variables of microstage were optimized and the optimal results were verified through the simulations and experiments.Results show that the workspace and workspace density may reach to 143.7μm×142.1μm and 2.521μm2/mm2 respectively, thus it may realize a higher workspace density.关键词
位移放大/柔性铰链/微动工作台/工作空间密度Key words
displacement amplifier/flexible hinge/microstage/workspace density分类
机械制造引用本文复制引用
曹瑞珉,郝丽娜,高金海..一种大工作空间密度的压电微动二维工作台设计[J].中国机械工程,2017,28(9):1016-1020,1028,6.基金项目
国家自然科学基金资助项目(61573093) （61573093）
