实验流体力学2017，Vol.31Issue(2)：34-38,5.DOI:10.11729/syltlx20170001
MEMS梁膜结构流量传感器设计与实现
Design and development of MEMS based beam-membrane structure flow sensor
陈佩 1赵玉龙 2田边2
作者信息
- 1. 长安大学 工程机械学院,西安 710064
- 2. 西安交通大学 机械制造系统工程国家重点实验室,西安 710054
- 折叠
摘要
Abstract
Flow is one of the important parameters in industrial detection.With the development and application of the Micro Electro-Mechanical Systems (MEMS) technology, flow detection is developing towards miniaturization, high precision and intelligence.A MEMS beam-membrane structure based differential pressure flow sensor is designed, and its working principle is analyzed.The sensor is fabricated by the silicon micromachining technology, and then the airflow test and water flow test are conducted.The sensitivity by the airflow test is 0.3508mV/(ms-1)2 and the basic accuracy is 0.5885%FS.The sensitivity by the water flow test is 415241mV/(ms-1)2 and the basic accuracy is 0.9323%FS.The results show that the designed sensor has sufficient sensitivity and basic accuracy for the flow measurement.关键词
微机电系统/流量/传感器/梁膜结构/微加工Key words
MEMS/flow/sensor/beam-membrane structure/micromachining分类
机械制造引用本文复制引用
陈佩,赵玉龙,田边..MEMS梁膜结构流量传感器设计与实现[J].实验流体力学,2017,31(2):34-38,5.
