实验流体力学2017，Vol.31Issue(2)：39-43,5.DOI:10.11729/syltlx20170016
MEMS热膜式壁面剪应力传感器微弱信号检测
Weak signal detection of MEMS hot-film wall shear stress sensors
摘要
Abstract
The weak signal of MEMS hot-film wall shear stress (WSS) sensors is hard to detect by direct amplification due to the inherent basic voltage.An effective method to solve this problem is proposed, which is to add an output-balancing system (OBS) before the signal is amplified.The basic voltage is decreased while the signal is retained.The development of the output-balancing system is presented, including the technical scheme, key technologies, examination and application.关键词
微机电系统/热膜/壁面剪应力/传感器/微弱信号检测Key words
MEMS/hot-film/wall shear stress/sensors/weak signal detection分类
信息技术与安全科学引用本文复制引用
孙海浪,田于逵,金磊,张璇,谢华..MEMS热膜式壁面剪应力传感器微弱信号检测[J].实验流体力学,2017,31(2):39-43,5.基金项目
国家重大科学仪器设备开发专项(2013YQ04091107) （2013YQ04091107）
