光学精密工程2017，Vol.25Issue(5)：1213-1221,9.DOI:10.3788/OPE.20172505.1213
零差移频式干涉图形相位锁定系统的超精密控制
Ultra-precision control of homodyne frequency-shifting interference pattern phase locking system
摘要
Abstract
When larger aperture holographic plane gratings are fabricated by the holographic exposure method, the homodyne frequency-shifting interference pattern phase locking system usually is used to improve the holographic exposure quality.This paper focuses on the ultra-precision control of the system.Firstly, the principles and structures of a novel homodyne frequency-shifting interference pattern phase locking system were introduced.The high-order linear model was fitted for a nonlinear model of the system based on the theoretical modeling and system identification and a controller of the system was designed by combining the fitting model and the system vibration test result.Then, an actual controlling test was performed based on the design result of the controller to implement the ultra-precision control of the system.Finally, an analysis method on frequency domain was used to explore the effect factors on control precision for the ripple wave in the system.The experiment results demonstrate that the controlling error of the system has reached to ±0.046 1 rad(3σ) and it shows high frequency error ripple wave.The causes of the high frequency error were researched, and the results indicate that limited to the noise, delay of the system and controller parameters, the drift of the interference pattern caused by continuous micro-vibration with a wide frequency range can not be completely restrained by the controller.关键词
全息曝光/零差移频式干涉图形相位锁定系统/系统辨识/高阶线性拟合/微振动/PID控制Key words
holographic exposure/homodyne frequency-shifting interference pattern phase locking system/system identification/high order linear fitting/micro-vibration/PID control分类
信息技术与安全科学引用本文复制引用
王磊杰,张鸣,鲁森,朱煜,杨开明..零差移频式干涉图形相位锁定系统的超精密控制[J].光学精密工程,2017,25(5):1213-1221,9.基金项目
国家自然科学基金资助项目(No.51677104) （No.51677104）
中国博士后科学基金资助项目(No.2017M610885) （No.2017M610885）
