计量学报2016，Vol.37Issue(z1)：204-211,8.DOI:10.3969/j.issn.1000-1158.2016.z1.46
表面微观形貌测量方法探讨
Methods Employed for Measuring Surface Microtopography
摘要
Abstract
A wide variety of methods used for measuring surface microtopography were presented.The principle,property,good quality,and shortcoming of each method were analyzed,and the typical commercial instruments based on these methods were listed respectively.Moreover,key problems were revealed,and the new trends of these means were also commented.关键词
计量学/表面微观形貌/接触法/非接触法/准接触法Key words
metrology/surface microtopography/contacting method/non-contacting method/pseudo-contacting method分类
通用工业技术引用本文复制引用
陈建超,冯世绪,郭保苏,刘哲建,王加春,吴凤和,赵岩..表面微观形貌测量方法探讨[J].计量学报,2016,37(z1):204-211,8.基金项目
燕山大学青年教师自主研究计划项目(15LGB001) （15LGB001）
河北省自然科学基金项目(E2016203462) （E2016203462）
河北省高等学校自然科学研究重点项目(ZD20131066/ZD2015023):河北省高等学校自然科学研究青年基金项目(QN2016004/QN2016121) （ZD20131066/ZD2015023）
