计量学报2017，Vol.38Issue(3)：257-261,5.DOI:10.3969/j.issn.1000-1158.2017.03.01
新型移相量块干涉仪的研制
The Development of the Phase Stepping Gauge Block Interferometer
摘要
Abstract
A gauge block interferometer for 0.5 ～ 100 mm by phase stepping interferometry is described.Two stabilized lasers,633 nm and 543 nm,are introduced into the interferometer using a single mode fiber.The interference fringes are taken using a CCD camera and the fractions of the fringes are calculated by five step phase stepping method with mechanical phase shift.The gauge block length is measured by the method of exact fractions.The uncertainty for gauge block measurement reaches to U =0.015 μm + 0.07 × 10-6L (L is the length of gauge block,mm).关键词
计量学/量块测量/移相干涉仪/相位解包裹/小数重合法Key words
metrology/gauge block measurement/phase stepping interferometer/phase unwrapping/method of exact fractions分类
通用工业技术引用本文复制引用
张旭东,刘香斌,王世婕,王振华,吴月艳..新型移相量块干涉仪的研制[J].计量学报,2017,38(3):257-261,5.基金项目
中国计量科学研究院基本科研业务费(AKY1329,AKY1617) （AKY1329,AKY1617）
