强激光与粒子束2017，Vol.29Issue(8)：1-14,14.DOI:10.11884/HPLPB201729.170045
微机械谐振式加速度计的研究现状及发展趋势
Research status and development trend of micro-mechanical resonance accelerometer
摘要
Abstract
The micro-mechanical resonance accelerometer(MMRA) is used to measure the acceleration by detecting the change of resonant frequency of the sensitive element.This kind of sensor has become one of the important development direction of micro-sensors because it has many advantages such as frequency signal output,high stability, sensitivity and precision.This paper describes the key technologies, difficulties and corresponding solutions, development trends of MMRA.The key technologies include mechanical structure, excitation and detection methods, and methods of changing the resonator stiffness.The three mechanical structures of the resonator and the asymmetry caused by the error of the micro-lever process are analyzed;according to the piezoelectric properties of the resonator''s materials, MMRA can be divided into piezoelectric MMRA and non-piezoelectric MMRA, piezoelectric MMRA employs piezoelectric excitation/piezoelectric detection and non-piezoelectric are mainly electrostatic excitation/capacitance detection;there are two main methods to change the stiffness of the resonator: axial stress method and electrostatic stiffness method, whose principles and scopes are analyzed and compared.Development of MMRA mainly includes four technical difficulties: mechanical coupling, temperature characteristics, process error, assembly and packaging, and the corresponding solutions are given.Integration, static stiffness, new materials, multi-axis and higher performance will be the main development trends for MMRA in the future.关键词
MMRA/谐振器/谐振频率/灵敏度Key words
micro-mechanical resonance accelerometer/resonator/resonant frequency/sensitivity分类
信息技术与安全科学引用本文复制引用
高杨,雷强,赵俊武,吕军光..微机械谐振式加速度计的研究现状及发展趋势[J].强激光与粒子束,2017,29(8):1-14,14.基金项目
国家自然科学基金项目(61574131) （61574131）
中国工程物理研究院超精密加工技术重点实验室基金项目(2014ZA001) （2014ZA001）
核探测与核电子学国家重点实验室开放课题基金项目(2016KF02) （2016KF02）
西南科技大学特殊环境机器人技术四川省重点实验室开放基金项目(14ZXTK01) （14ZXTK01）
西南科技大学研究生创新基金项目(16YCX103) （16YCX103）
