物理学报2017，Vol.66Issue(7)：87-103,17.DOI:10.7498/aps.66.070708
光纤法布里-珀罗干涉温度压力传感技术研究进展
Research progress of in-fiber Fabry-Perot interferometric temperature and pressure sensors
摘要
Abstract
Optical fiber sensors based on Fabry-Perot interferometer (FPI) have attracted intensive attention for sensing applications in temperature and pressure measurement,owing to their compact,small size,fast responses,high resolution,high sensitivity,good stability,and resistance to electromagnetic interference.It's known that the in-fiber optic interferometers based on single-mode fibers can exhibit compact structures,easy fabrication and low cost.In this paper,firstly,the basic principle of in-fiber FPIs is introduced.Secondly,we review several kinds of typical in-fiber FPIs formed in single-mode fibers fabricated with different post-processing techniques,such as chemical etching,arc discharge,femtosecond laser micromachining,and polymer coating,etc.Finally,the optical sensors based on in-fiber FPIs,with a capability of simultaneous multi-parameter sensing of temperature and pressure,are summarized and prospected.关键词
光纤传感器/法布里-珀罗干涉仪/温度传感器/压力传感器Key words
optical fiber sensor/Fabry-Perot interferometer/temperature sensor/pressure sensor引用本文复制引用
李自亮,廖常锐,刘申,王义平..光纤法布里-珀罗干涉温度压力传感技术研究进展[J].物理学报,2017,66(7):87-103,17.基金项目
国家自然科学基金(批准号:61635007,61425007,61377090,61575128)、广东省自然科学基金(批准号:2014A030308007,2014B050504010,2015B010105007,2015A030313541)、深圳市科技创新委员会项目(批准号:GJHZ2015031309375575,JCYJ20160520163134575,JCYJ20160427104925452)和珠江学者项目资助的课题.Project supported by the National Natural Science Foundation of China (Grant Nos.61635007,61425007 61377090,61575128),the Guangdong Natural Science Foundation,China (Grant Nos.2014A030308007,2014B050504010,2015B010105007,2015A030313541),the Science and Technology Innovation Commission of Shenzhen,China (Grant Nos.GJHZ20150313093755757,JCYJ20160520163134575,JCYJ20160427104925452),and Pearl River Scholar Fellowships,China. （批准号:61635007,61425007,61377090,61575128）
