溶液法氧化物薄膜晶体管的印刷制备
Oxide semiconductor thin film transistor device print fabrication based on solution method
摘要
Abstract
In recent years, solution method for electronic device print fabrication has garnered increasing interest and attention due to their green, low-cost, simple process, flexible and good adaptive, particularly in high-performance oxide semiconductor thin film transistor in flat panel display and consumer electronics industries.This review reported latest progresses of print oxide semiconductor TFT including structure optimization, semiconductor layer material, electrode layer material, insulating layer material and associated precursor selection.The relationship between device stability and post-treatment is described clearly, and the key of performance promotion is found.Moreover, several personal insights on the existing challenges and future research direction of print oxide semiconductor TFT are considered based on current advances.关键词
溶液法/氧化物薄膜晶体管/印刷制备/前驱体/后处理Key words
solution processes/oxide semiconductor thin film transistor/print fabrication/precursors/post-treatment分类
信息技术与安全科学引用本文复制引用
钟云肖,兰林锋,彭俊彪,谢宇,周尚雄,袁炜健,史沐杨,姚日晖,宁洪龙,徐苗,王磊..溶液法氧化物薄膜晶体管的印刷制备[J].液晶与显示,2017,32(6):443-454,12.基金项目
国家自然科学基金重大集成项目(No.U1601651) （No.U1601651）
国家重点基础研究发展规划项目计划(No.2015CB655004) （No.2015CB655004）
国家重点研发计划专项项目(No.2016YFB0401504 （）
No.2016YFF0203603) （）
广东省自然科学基金资助项目(2016A030313459) （2016A030313459）
广东省科技计划项目(No.2014B090915004 （）
No.2015B090914003 （）
No.2016A040403037 （）
No.2016B090907001 （）
No.2016B090906002) （）
中央高校基本科研业务费专项资金(No.2015ZP024 （）
No.2015ZZ063) （）
Supported by NSFC (No.U1601651) （No.U1601651）
National Key Basic Research and Development Program of China(No.2015CB655004) （No.2015CB655004）
Founded by MOST, National Key R&D Program of China(No.2016YFB0401504 （）
No.2016YFF0203603) （）
Guangdong Natural Science Foundation(No.2016A030313459) （No.2016A030313459）
Science and Technology Project of Guangdong Province(No.2014B090915004 （）
No.2015B090914003 （）
No.2016A040403037 （）
No.2016B090907001 （）
No.2016B090906002) （）
Fundamental Research Funds for the Central Universities(No.2015ZP024 （）
No.2015ZZ063) （）
