材料工程2017，Vol.45Issue(3)：119-128,10.DOI:10.11868/j.issn.1001-4381.2015.000229
类金刚石膜研究进展
Progress of Diamond-like Carbon Films
摘要
Abstract
Diamond-like carbon (DLC) films had many unique and outstanding properties such as high thermal conductivity,high hardness,excellent chemical inertness,low friction coefficients and wear coefficients.The properties and combinations were very promising for heat sink,micro-electromechanical devices,radiation hardening,biomedical devices,automotive industry and other technical applications,more research and a lot of attention were attracted in recent years.The research progress of diamond-like films and the nucleation mechanism of film were summarized,and application prospect of DLC films were demonstrated.The aim of this paper is to provide insights on the research trend of DLC films and the industry applications.关键词
类金刚石膜/成膜机理/结合力/摩擦性能Key words
diamond-like carbon/deposition mechanism/adhesion/tribological property分类
数理科学引用本文复制引用
陈青云,施凯敏,苏敏华,吕会议,罗瑜,曾陈..类金刚石膜研究进展[J].材料工程,2017,45(3):119-128,10.基金项目
国家自然科学基金资助项目(11304254) （11304254）
香港研究资助局基金资助(715612,17206714) （715612,17206714）
西南科技大学核废物与环境安全国防重点学科实验室基金资助(13zxnk11,13zxnk09) （13zxnk11,13zxnk09）
