电工技术学报2017，Vol.32Issue(2)：13-23,11.
微纳尺度电气击穿特性和放电规律研究综述
Review on the Breakdown Characteristics and Discharge Behaviors at the Micro & Nano Scale
摘要
Abstract
The research on breakdown characteristics and discharge behaviors is gaining attention nowadays.In this paper,the research progress and achievement on this field for nearly 70 years have been reviewed,emphasizing on the experimental technologies,discharge behaviors and physical mechanisms of dielectric systems at various dimensions (the macroscale electrodes with microscale gaps,the microscale electrodes with micro-and sub-microscale gaps and the nanoscale electrodes with nano-and sub-nanoscale gaps).The influences of gap separations,gas pressure,electrode material,electrode shape on breakdown characteristics were summarized.Besides,the discharge behaviors of various dielectric systems were discussed.As a consequence,the review of breakdown characteristics and discharge behaviors at the micro & nano scale is beneficial to recognizing the critical problems and making suggestions for the future research,which could be of great importance to the electrical breakdown theory at the micro & nano scale.关键词
微纳尺度/电气击穿/放电规律/Paschen曲线/Townsend雪崩击穿/场致发射Key words
Micro & nano scale/electrical breakdown/discharge behaviors/Paschen's curve/Townsend avalanche breakdown/field emission分类
数理科学引用本文复制引用
成永红,孟国栋,董承业..微纳尺度电气击穿特性和放电规律研究综述[J].电工技术学报,2017,32(2):13-23,11.基金项目
国家自然科学基金创新研究群体基金(51221005),中国博士后科学基金(2015M572559)和强脉冲辐射环境模拟与效应国家重点实验室专项经费(SKLIPR.1512)资助项目. （51221005）
