金刚石与磨料磨具工程2017，Vol.37Issue(1)：25-28,33,5.DOI:10.13394/j.cnki.jgszz.2017.1.0005
不同碳源浓度下热丝CVD金刚石薄膜的惰性示踪气体发射光谱法研究
Trace rare gases OES: nonintrusive method for the process of CVD diamond film growth under different carbon source
摘要
Abstract
The diamond films were prepared by hot filament chemical vapor deposition.Trace rare gases optical emission spectroscopy (OES) was used to measure the active species during the diamond growth.The quality and morphology of grown diamond films were characterized by SEM and Raman spectra.When the other parameters were kept constant,with the increasing gas flux of the carbon source,the electron temperature generally decreased.However,if the carbon source flow was between 50 cm3/min and 70 cm3/min there appeared an abnormal situation,which was to first increase and then decline,maximum peak at the vicinity of 60 cm3/min,when the charged particles reached the substrate with the maximum flux and energy.Meanwhile,the content of carbon-containing groups,such as CO,C2 and CH,was at there minimum value near vicinity of 60 cm3/min minimum.Vapor depositing process went towards the direction to grow diamond film,with maximum growth rate.However,the quality of diamond films decreased as the concentration of carbon source increased.关键词
化学气相沉积/金刚石薄膜/光谱诊断/惰性示踪气体Key words
chemical vapor deposition/diamond film/optical emission spectroscopy/trace rare gases分类
化学化工引用本文复制引用
范咏志,王传新,易成,代凯,许青波,马志斌,吴超..不同碳源浓度下热丝CVD金刚石薄膜的惰性示踪气体发射光谱法研究[J].金刚石与磨料磨具工程,2017,37(1):25-28,33,5.基金项目
国家自然科学基金(11575134)资助项目 （11575134）
武汉工程大学研究生教育创新基金(CX2015006). （CX2015006）
