传感技术学报2017,Vol.30Issue(6):826-830,5.DOI:10.3969/j.issn.1004-1699.2017.06.004
碳纳米管可控介电泳参数模拟研究
The Simulation Study on Controllable Dielectrophoresis Parameters of Carbon Nanotube
摘要
Abstract
The structure of carbon nanotube(CNT)and physical parameters of the microelectrode exert significant influence on the efficiency and precision of dielectrophoresis ( DEP ) assembly during the process of fabricating micro-nano devices. The shape of electrodes and the ratio of the gap between two electrodes to CNT lengths(λ) are two controllable parameters which are crucial to the cost of devices fabrication. Based on the finite element method, the influence of DEP force affected by the two parameters was investigated. The result shows the shape of electrodes exerts minor influence on the DEP velocity by normalizing the DEP velocity curves of three electrodes. Parameterλaffects DEP process obviously compared with the shape of electrodes. Although decreasing the gap between two e-lectrodes is more conducive to assembly,we give the optimum interval of λ is 0.5~1.0 considering the difficulty of processing microelectrode technology and cost. In addition,the revised formula of threshold concentration was also presented in the manuscript according to the requirement of assembly experiment. The paper has a theoretical signif-icance in improving the precision and efficiency of DEP assembly.关键词
电极形状/电极间距与碳纳米管长度之比/介电泳力/优化区间/阈值浓度Key words
the ship of electrodes/the ratio of the gap between two electrodes to CNT lengths/DEP force/optimum interval/threshold concentration分类
信息技术与安全科学引用本文复制引用
刘亚丽,冀健龙,葛阳,桑胜波,霍远樑,张文栋..碳纳米管可控介电泳参数模拟研究[J].传感技术学报,2017,30(6):826-830,5.基金项目
山西省基础研究计划项目(2015021092) (2015021092)
国家863 项目(2015AA042601) (2015AA042601)
国家自然科学基金重点支持项目(61471255,61474079) (61471255,61474079)