传感技术学报2017，Vol.30Issue(6)：831-835,5.DOI:10.3969/j.issn.1004-1699.2017.06.005
非焊接式纳米线机械性能测试器件结构设计
Design of a MEMS Device for Mechanical Property Testing of Nanowires without Welding
摘要
Abstract
In researches about mechanical properties of nanowires,welding methods,such as FIB and EBID which are most common methods used to fixed nanowires,reduce devices lifetime and repeatability. In order to overcome the shortcomings of the welding method,a new MEMS device without need of welding or depositing was designed in this paper. Basing on the electrostatic interdigital structure and bearing beam structure,a clamping and stretching structure using the rigidity difference was designed,in which a V-shaped structure is designed to avoid welding or depositing. It was simulated and validated by FEA, and the optimal structure was obtained. When the angle of V-shaped gap is less than 22. 5°, it can meet the requirements of the mechanical properties of nanowires, and improve application repeatability.关键词
微机电系统/机械特性/刚度差/非焊接式/静电驱动/接触滑移Key words
MEMS/mechanical properties/rigidity difference/without welding/electrostatic actuation/contact slip分类
能源科技引用本文复制引用
杜林,饶进军,吴智政,刘梅,曹宁..非焊接式纳米线机械性能测试器件结构设计[J].传感技术学报,2017,30(6):831-835,5.基金项目
国家自然科学基金项目(61573236) （61573236）
上海市科委基金项目(14JC1491500) （14JC1491500）
