测控技术2017，Vol.36Issue(6)：72-75,4.
微纳加工中高精度环境温度控制系统的设计
Design of High Precision Temperature Control System for Micro-Nano Processing
摘要
Abstract
Statistics show that in the field of micro-nano processing,the error caused by the thermal deformation takes up from 40％ to 70％ of the total error,which has become one of the main factors of restricting the development of micro-nano processing.An incremental PID control algorithm based on PLC is used to achieve highprecision control of ambient temperature in the process of micro-nano control,and features of LabVIEW's flexible programming is taken full advantage of to design the interface of system.Meanwhile,through the RS485 interface,the computer real-time monitoring on the PLC is achieved and the measurement data are stored,then the precision of these data is analyzed.After a long time stability test,the system can achieve the precision of ± 0.05 C per 24 h,which meets the requirements of this system for high-precision temperature control.关键词
微纳加工/高精度/增量式PIDKey words
micro-nano processing/high-precision/incremental PID分类
信息技术与安全科学引用本文复制引用
姚龙隆,陈晓荣,杨海马,涂建坤,陈成..微纳加工中高精度环境温度控制系统的设计[J].测控技术,2017,36(6):72-75,4.基金项目
上海市自然科学基金项目(15ZR1417400) （15ZR1417400）
国家自然科学基金青年基金项目(61302181) （61302181）
