电子学报2017，Vol.45Issue(5)：1072-1077,6.DOI:10.3969/j.issn.0372-2112.2017.05.007
一种基于大范围扫描离子电导显微镜的形貌和体积测量方法
Topography and Volume Measurement Method Based on Large-scale Scanning Ion Conductance Microscopy
摘要
Abstract
A topography and volume measurement method is proposed to deal with the drawbacks of existing methods that they cannot simultaneously finish measuring the global and local morphologies of large-scale sample surface and volume calculation in a three-dimensional (3D) and high-resolution way.The large-scale scanning ion conductance microscopy (L-SICM) system was firstly built and the data stitching technique was used to extend the lateral measurement range of the existing SICM system,thus the large-scale,3D and high-resolution measurement result of the sample morphology can be obtained.Finally,digital image processing techniques such as subtracting background were utilized to accurately calculate the volume of the target object.Experimental results on sub-mm level sample indicate that the L-SICM based measurement method can effectively measure the global and local morphologies of large-scale sample in a 3D and high-resolution way and accomplish calculating the target volume and avoiding the nonlinear errors introduced by the optical measurement methods.Moreover,using smaller lateral scanning step (125 nm) can decrease the volumetric measurement error by 5.82% and the standard deviation of volume measurement by 38.12%,therefore improving the accuracy and stability of the measurement system.关键词
形貌和体积测量/扫描离子电导显微镜/大范围/数据拼接Key words
topography and volume measurement/scanning ion conductance microscopy/large-scale/data stitching分类
天文与地球科学引用本文复制引用
郭仁飞,庄健,于德弘..一种基于大范围扫描离子电导显微镜的形貌和体积测量方法[J].电子学报,2017,45(5):1072-1077,6.基金项目
国家自然科学基金(No.51375363) （No.51375363）
陕西省科技厅工业攻关项目(No.2013GY2-04) （No.2013GY2-04）
