高电压技术2017，Vol.43Issue(6)：1775-1783,9.DOI:10.13336/j.1003-6520.hve.201700527004
HMDSO添加对大气压Ar等离子体射流阵列放电特性的影响
Effect of HMDSO Addition on Discharge Characteristics of Atmospheric Pressure Plasma Jet Array in Argon
摘要
Abstract
Atmospheric pressure plasma jet array is suitable for surface modification of large-area complicated material.To satisfy the needs of large-area plasma sources for material surface hydrophobic treatment,an atmospheric-pressure 1D Ar plasma jet array was accomplished and hexamethyldisiloxane (HMDSO) was added into its working gas to acquire plasma jet army containing hydrophobic containments.Electrical and optical methods were used to diagnose the discharge characteristic of jet array.Effects of applied voltage magnitude and content of HMDSO on discharge uniformity,discharge power,transported charge and main active particles were studied for optimizing the working condition of APPJ array in Ar and providing reference for hydrophobic modification by jet array.Results show that,as the content of HMDSO increases,the magnitude of discharge pulse current,the number of pulse current in each half cycle,discharge power,and transported charge are decreased,and the repulsion and coupling effect are restrained and the discharge uniformity is strengthened.Spectral intensities of main particles generated by discharge decrease as the content of HMDSO are increased,while the spectral intensity of silicon is increased before its descent.The maximal peak of silicon intensity exists when the content is 0.02％ and plasma jet array fed by Ar/HMDSO working on this condition can be applied in hydrophobic material surface modification to achieve favorable effect.关键词
等离子体射流/射流阵列/含硅成分/憎水性/放电特性Key words
plasma jet/jet array/silicon-containing component/hydrophobicity/discharge characteristics引用本文复制引用
方志,张波,周若瑜,郝丽丽,侯永全..HMDSO添加对大气压Ar等离子体射流阵列放电特性的影响[J].高电压技术,2017,43(6):1775-1783,9.基金项目
国家自然科学基金(51377075 （）
51677083) （）
江苏省“六大人才高峰”项目(2014-XNY-006).Project supported by National Natural Science Foundation of China (51377075,51677083),the "Six Talent Peak" Projects of Jiangsu Province (2014-XNY-006). （2014-XNY-006）
