光学精密工程2017，Vol.25Issue(6)：1449-1457,9.DOI:10.3788/OPE.20172506.1449
基于并行共聚焦显微系统的物方差动轴向测量
Object-side based differential axial measurementbased on parallel confocal microscopy
摘要
Abstract
The differential confocal microscopic imaging technology can obtain high axial measurement accuracy.However,existing differential confocal microscopic imaging techniques mainly employed to laser scanning confocal microscopy can not satisfy requirements of non-contact online and on-site measurement for workpieces during micro-nano machining processes.Axial measurement methods that were applicable to parallel confocal technology were proposed based on the analysis that differential confocal microscopic imaging system could realize axial measurement principle.In the method,a uniform white light illumination was used.The image space only needed a camera as detector,and the object space made twice imaging of samples before and after the focal point by moving the objective table,then the height of the object surface could be obtained according to the scaled differential curve in advance.Both the theoretical simulation and experimental results are indicated that the method can realize axial measurement with high accuracy.For the measurement of step samples with 500 nm,the average error is 2.9 nm and the relative error is 0.58%.The method is simple and low-cost with high measurement accuracy,thus can be used for general microscope and be easy to realize rapid restoration and measurement of three-dimensional images for samples.关键词
三维形貌测量/物方差动共焦/并行轴向测量/非接触式/数字微镜器件Key words
3D topography measurement/object-side based differential confocal method/parallel axial measurement/non-contact/Digital Micro-mirror Device(DMD)分类
信息技术与安全科学引用本文复制引用
刘志群,易定容,孔令华,张勇贞,刘婷,王梓..基于并行共聚焦显微系统的物方差动轴向测量[J].光学精密工程,2017,25(6):1449-1457,9.基金项目
国家科技支撑计划一级子课题资助项目(No.2012BAI23B04) （No.2012BAI23B04）
福建省中青年教师教育科研项目(No.JAT160394) （No.JAT160394）
华侨大学高层次引进人才科研启动资金资助项目(No.Z14Y0064) （No.Z14Y0064）
