光学精密工程2017，Vol.25Issue(6)：1513-1518,6.DOI:10.3788/OPE.20172506.1513
超润滑石墨表面的光谱表征研究
Research on spectral characterization of superlubricity graphite surface
摘要
Abstract
In order to seek for a new ideal method to solve friction,abrasion and other interfacial effect problems in micro/nano electro mechanical system,the influence of graphite contact interfaces on graphite superlubricity and the sources of resistance were researched.First,the electron beam lithography,ion beam etching and other micro-processing methods were used to prepare microscale graphite mesa,and graphite surface with superlubricity was obtained by using micro-nano manipulator to shear the graphite mesa.Then,the Raman spectrum,nanoscale infrared spectrum and atomic force microscope were used to characterize the surface of the obtained superlubricity graphite.Finally,energy dispersive spectrometer was taken to analyze micro-area elements in graphite platform.The result shows that the surface of superlubricity graphite has atomically smooth flatness and has high order degree,but there are multiple defects on the edge of the graphite surface;and multiple molecules are absorbed on the surface of the graphite in the process of machining and in the atmospheric environment.The content of marginal oxygen atom is 24.2% higher than the content of in-plane oxygen atom.In the process of pushing graphite platform,the marginally absorbed molecule will hinder the relative sliding of contact interface of superlubricity graphite.Moreover,energy is needed to overcome the absorption of these molecules,which becomes the source of frictional resistance.关键词
超润滑/光谱表征/拉曼光谱/红外光谱/石墨Key words
Super lubrication/spectral characterization/Raman spectrum/infrared spectrum/graphite分类
数理科学引用本文复制引用
史云胜,刘秉琦,杨兴..超润滑石墨表面的光谱表征研究[J].光学精密工程,2017,25(6):1513-1518,6.基金项目
国家自然科学基金资助项目(No.51375263) （No.51375263）
