中北大学学报（自然科学版）2017，Vol.38Issue(3)：373-379,7.DOI:10.3969/j.issn.1673-3193.2017.03.021
四步相移法的非线性相位误差补偿方法
A Compensation Approach of Phase Errors Caused by Gamma Nonlinearity for Four-Step Phase-Shifting Algorithm
摘要
Abstract
Gamma nonlinearity of the projector-camera pair is a main source of phase error about phase measuring pro-filometry(PMP).It causes higher-order harmonics in deformed pattern captured by camera and leads to periodic phase error at unwrapped phase map.For four-step phase-shifting algorithm, the third harmonic is the main reason which leads to appearance of periodic phase error.In order to decrease the phase error caused by gamma nonlinearity, the model between phase error and wrapped phase was established and a phase error compensation method was proposed under the condition of gamma value unknown.The simulated measurement shows that the volatility of phase error before and after compensation is less than 0.0063 rad and 0.000354 rad respectively (γ=2.2, p=0.8).The experimental results show that RMS of unwrapped phase before and after compensation about a uniform is 0.035 rad and 0.007 rad respectively and the maximum phase error decrease from 0.0867 rad to 0.0308 rad after compensation.关键词
误差补偿/四步相移法/gamma非线性/三次谐波/谐波系数Key words
phase error compensation/four-step phase-shifting algorithm/gamma nonlinearity/the third harmonic/coefficient of harmonic分类
信息技术与安全科学引用本文复制引用
赵贤凌,刘建生,张华煜,武迎春..四步相移法的非线性相位误差补偿方法[J].中北大学学报（自然科学版）,2017,38(3):373-379,7.基金项目
国家自然科学基金青年科学基金资助项目(61601318) （61601318）
山西省青年科技研究基金资助项目(201601D021078) （201601D021078）
