实验流体力学2017，Vol.31Issue(3)：66-71,6.DOI:10.11729/syltlx20170019
水下MEMS壁面剪应力传感器标定不确定度分析研究
Calibration and uncertainty analysis of MEMS wall shear stress sensor
摘要
Abstract
In this paper, the calibration and uncertainty analysis of the MEMS shear stress sensor are undertaken.Shear stress is generated by the pressure gradient method, the main test equipment is the flat verification water channel.Different voltage outputs are measured under different wall shear stress conditions, and the calibration coefficient can be got through matching the shear stress and voltage with the least square method.The shear stress uncertainty and calibration coefficient uncertainty can be got through measuring the pressure and voltage repeatedly and checking the related product manual.As the result indicated, the uncertainty of the shear stress measurement is within 7%, it tends to be smaller as the free-stream velocity gets higher.The uncertainty of the voltage measurement is within 7%, and it also tends to be smaller as the free-stream velocity gets higher, so that the sensor can be used to wall shear stress measurement reliably.The shape of calibration curve is reasonable, its correlation coefficient of fitting is large enough, it means that the calibration equation is reliably.关键词
MEMS传感器/壁面剪应力/标定/压力梯度法/扁平水槽Key words
LDV/boundary layer parameters/CFD/underwater flat plate分类
建筑与水利引用本文复制引用
沈雪,田于逵,张璇,孙海浪,谢华,张楠..水下MEMS壁面剪应力传感器标定不确定度分析研究[J].实验流体力学,2017,31(3):66-71,6.基金项目
国家重大科学仪器设备开发专项(2013YQ040911) （2013YQ040911）
