表面技术2017，Vol.46Issue(6)：110-116,7.DOI:10.16490/j.cnki.issn.1001-3660.2017.06.017
选择性键合金属-类金刚石复合薄膜的性能研究
Properties of DLC Films Doped with Metal by Selective Bonding
摘要
Abstract
The work aims to study effects of DLC films doped with metallic elements (Cu,Al,Ti) featuring in selective bonding on structure and tribological properties of such DLC films. With high purity graphite and metallic composite target as targets, metallic composite DLC films were fabricated on n-(100) single crystal silicon wafers and polished stainless steel sheets 304 by applying ion-source plating technology. The Raman Spectrometer excited by 514.6 nm Ar+ was used to analyze the me-tallic composite DLC films. Knoop hardness tester and surface profiler were used to calculate microhardness and residual stress of the metallic composite films. AFM was used to analyze morphology and structure of DLC films. Ball-disk sliding abrasion tester was used to analyze tribological property. The films doped with different metallic elements exhibited various properties. The wear rate changed a lot while frictional coefficient was stable after doping with different metallic elements. The original DLC films featured in maximum content of sp3 bonding, high hardness, residual stress and easy falling-out during friction process. The Ti-DLC composite films featured in good surface quality and compact structure. The films maintained at high hardness while releasing residual stress. The minimum measured wear rate of Ti-DLC composite films was 0.13×10-15 m3/nm. Doping different metallic elements in DLC films can control microstructure, improve mechanical properties (including hardness and residual stress) and abrasion resistance obviously. The tribological properties of the films are closely related to film micro-structure and the existing form of metallic elements.关键词
金属掺杂/类金刚石薄膜/硬度/残余应力/摩擦学性能/多相结构Key words
metal doping/diamond like carbon films/hardness/residual stress/frictional properties/multiphase structure分类
矿业与冶金引用本文复制引用
王志峰,徐斌,张书姣,朱丽楠,周兵..选择性键合金属-类金刚石复合薄膜的性能研究[J].表面技术,2017,46(6):110-116,7.基金项目
国家自然科学基金(51502193) （51502193）
山西省重点研发计划和应用基础项目(201603D421035 & 201601D021057) Supported by the National Natural Science Foundation of China (51502193), Key R&D Program and Natural Science Foundation of Shanxi Provincial(201603D421035 & 201601D021057) （201603D421035 & 201601D021057）
