表面技术2017，Vol.46Issue(7)：1-6,6.DOI:10.16490/j.cnki.issn.1001-3660.2017.07.001
多弧离子镀制备CrAlSiN/TiAlSiN纳米涂层的结构和性能研究
Structure and Properties of CrAlSiN/TiAlSiN Nano-coatings Prepared by Multi-arc Plasma Deposition
摘要
Abstract
The work aims to study effects of modulation period on structure and mechanical properties of CrAlSiN/TiAlSiN nanocomposite coatings. Periods of coating structure was adjusted by changing revolving speed of substrate (revolving speed as 2, 4, 6 and 8 r/min). Nanocomposite coatings with different modulation periods were prepared by cathodic multi-arc ion plating with CrAlSi and TiAlSi as the cathode arc target materials. Microstructure, chemical composition, surface morphology and cross-sectional morphology of the coatings were measured with X-ray diffractometer, X-ray photoelectron spectrometer, scan- ning electron microscopy and atomic force microscopy, respectively. Mechanical properties of the coatings with different mod-ulation periods were analyzed with microhardness tester, scratch tester and friction tester. The CrAlSiN/TiAlSiN nanocomposite coatings had the same phase structure at different revolving speed, including CrAl, CrN and TiN phases. Al element was nearly subject to solid solution in CrAl phase. Si element was present in the coating as an amorphous phase or was wrapped with an amorphous compound. With the decrease of the revolving speed, hardness of the composite coatings first increased and then de-creased while friction coefficient and RMS roughness first decreased and then increased. The higher the hardness was, the lower the friction coefficient and RMS roughness would be. The hardness and friction coefficient of the CrAlSiN/TiAlSiN nanocom-posite coatings are significantly affected by the modulation periods. At the revolving speed of 6 r/min, the coatings have a maximum microhardness of 38 GPa and lowest coefficient of friction (0.375).关键词
多弧离子镀/调制周期/表面形貌/显微硬度/摩擦因数/膜基结合力Key words
multi-arc plasma deposition/modulation period/morphology/microhardness/friction coefficient/adhesvie force分类
矿业与冶金引用本文复制引用
李娜,韩滨,左文彬,王泽松,柯贤文,付德君..多弧离子镀制备CrAlSiN/TiAlSiN纳米涂层的结构和性能研究[J].表面技术,2017,46(7):1-6,6.基金项目
国家自然科学基金项目(11375135) （11375135）
科技部国际科技合作专项(2015DFR00720)Supported by the National Natural Science Foundation of China (11375135) and International Science and Technology Cooperation Project of Ministry of Science and Technology (2015DFR00720) （2015DFR00720）
