材料科学与工程学报2017，Vol.35Issue(3)：394-400,431,8.DOI:10.14136/j.cnki.issn1673-2812.2017.03.010
3D ES势垒对Cu(111)和Cu(OO1)晶面同质外延生长的影响
Effects of Three-dimensional Ehrlich-Schwoebel Barriers on Cu(111) and Cu(100) Homoepitaxial Growth
摘要
Abstract
The 3-dimensional Ehrlich-Schwoebel(3D ES) barriers directly affect the interlayer diffusion,and the 2D ES barrier and the 3D ES barrier are different on the Cu(111) and Cu(100) surface respectively.Based on (1 + 1) dimensional KMC method,we mainly focused on the homogeneous epitaxial growth of Cu films on these two special crystal surfaces in this paper.And we found that the roughness of the film decreases with the increase of temperature.The roughness on Cu (111) surface drops faster than that on Cu(100) surface,and Cu(111) surface is more conducive to the growth of film due to lower 2D ES barrier.For the application of nanorods,the growth rate declines gradually when the growth time is short,but the growth rate of Cu(100) surface is faster than that on Cu(111) surface.However,with the growth time increasing,the effects on these two surfaces are different in appearance of multi-layer steps.The growth rate of Cu(111) surface rises and eventually exceeds the Cu(100) surface.The multi-layer steps formed on Cu(111) surface is more favorable for the growth of nanorods because of the larger 3D ES barrier while the multi-layer steps are hard to form on Cu(100) surface and the growth rate of nanorods does not increase due to the lower 3D ES barrier.The existence of 3D ES barrier leads to the emergence of multi-layer steps and the larger 3D ES barrier is conducive to the growth of nanorods.关键词
动力学蒙特卡洛模拟/表面粗糙度/薄膜生长/(1+1)维模型Key words
Kinetic Monte Carlo simulations/surface roughness/thin film growth/(1 + 1)dimensional分类
数理科学引用本文复制引用
董贵仁,唐吉玉,崔靖,刘娟,何右青..3D ES势垒对Cu(111)和Cu(OO1)晶面同质外延生长的影响[J].材料科学与工程学报,2017,35(3):394-400,431,8.基金项目
National Natural Science Foundation of China(61271127) （61271127）
