电子科技大学学报2017，Vol.46Issue(4)：625-629,5.DOI:10.3969/j.issn.1001-0548.2017.04.024
紫外光驱动微纳结构薄膜的气敏特性研究
Progress in Research on NO2 Gas Sensing Properties of ZnO Micro/Nanoporous Array Thin Films Under UV Irradiation
摘要
Abstract
Zinc oxide (ZnO) mocro/nanoporous array thin film-based gas sensors were prepared by the organic template-based solution dipping——monolithic transfer strategy. The research focuses on nitrogen dioxide (NO2) gas sensing properties of different aperture sizes of ZnO micro/nanoporous array thin films under UV irradiation with different intensity. The results show that ZnO micro/nanoporous array thin film can be obtained by 500 nm polystyrene (PS) as template, the film-based sensor has high sensitivity and fast response and recovery time when the intensity of UV light is 0.35 mW/cm3. This kind of sensor shows good anti-disturbance to the other gases, such as acetone, formaldehyde, H2S, SO2, and CH4.关键词
气敏性能/微纳有序多孔薄膜/灵敏度/紫外光/ZnOKey words
gas sensing properties/micro/nanoporous/sensitivity/UV light/ZnO分类
数理科学引用本文复制引用
苏星松,周飞,许宗珂,李圆圆,段国韬..紫外光驱动微纳结构薄膜的气敏特性研究[J].电子科技大学学报,2017,46(4):625-629,5.基金项目
国家自然科学基金面上项目(11674320,51471161) （11674320,51471161）
国家重点研发计划(2016YFC0201103) （2016YFC0201103）
中国科学院青年创新促进优秀会员项目(QYZDB-SSW-JSC017) （QYZDB-SSW-JSC017）
中国科学院前沿科学重点研究项目(QYZDB-SSW-JSC017) （QYZDB-SSW-JSC017）
安徽省杰出青年科学基金(1408085J10) （1408085J10）
