计算机工程与应用2017，Vol.53Issue(14)：178-182,245,6.DOI:10.3778/j.issn.1002-8331.1602-0162
不对称光阑对相干衍射成像缺陷检测效果的影响
Impacts of asymmetric aperture on coherent diffractive imaging reconstruction per-formance in defect inspection
摘要
Abstract
The defects in manufacturing of microelectronic devices could be significant fatal factor for product quality. So a variety of defect inspection technology may be developed or improved. The Coherent Diffractive Imaging(CDI)is a lensless technology, which provides a flexible, high resolution and non-destructive way to locate internal defects in micro-electronic devices. However, there are still some problems to be solved in the CDI. A masking approach is developed to eliminate simultaneous twin-images in phase retrieval process. The simulation shows it is feasible. Simulation results also demonstrate the masking approach has a faster convergence speed. Moreover, the new improvement is not sensitive to the aperture size error in iterative process. The technical basis could be established for the CDI measurements.关键词
缺陷检测/相干衍射成像/相位恢复/迭代算法/孪生像Key words
defect inspection/Coherent Diffractive Imaging(CDI)/phase retrieval/iterative algorithms/twin-images分类
信息技术与安全科学引用本文复制引用
盛昌杰,韩雷..不对称光阑对相干衍射成像缺陷检测效果的影响[J].计算机工程与应用,2017,53(14):178-182,245,6.基金项目
国家重点基础研究计划课题(No.2015CB057202). （No.2015CB057202）
