无机材料学报2017，Vol.32Issue(7)：744-750,7.DOI:10.15541/jim20160512
晶硅炉热场用碳材料在硅蒸汽中的腐蚀行为研究
Corrosion Behavior of Carbon Materials Used in Crystalline Silicon Furnace in Silicon Vapor
摘要
Abstract
The experimental of silicon vapor corrosion under different corrosion conditions were carried out on dif-ferent carbon materials (graphite, C/C, rigid carbon fiber felt (RCFF)), which were used as thermal field materials in silicon crystal growth furnace. The silicification corrosion behavior of the three carbon materials was studied. The re-sults showed that the three carbon materials are easily corroded by silicon vapor at elevated temperature. The composi-tion and microstructure of the three carbon materials have great influence on silicification corrosion behavior. Silicon vapor can infiltrate into interior of the carbon materials by pores and flaws, and then react with substrates to cause corrosion. After silicification corrosion, many cracks are observed on the surface of the three carbon materials, and the carbon fibers are severely destroyed in C/C composites and RCFF. Silicification corrosion level is affected by the form and strength of carbon fibers in C/C composites and RCFF. The corrosion of carbon fiber is necking and cleavage cracking for carbon fiber woven with high strength in C/C composites, while that is fragmenting and pulverizing for short carbon fiber with poor strength in RCFF. The corrosion parameters also have significant influence on degree of silicification corrosion. With the corrosion temperature increasing or corrosion time extending, the silicification corro-sion degree for these carbon materials are all increased.关键词
碳材料/硅化/腐蚀行为/腐蚀参数Key words
carbon materials/silicification/corrosion behavior/corrosion parameters分类
通用工业技术引用本文复制引用
施伟,谭毅,郝建洁,李佳艳..晶硅炉热场用碳材料在硅蒸汽中的腐蚀行为研究[J].无机材料学报,2017,32(7):744-750,7.基金项目
高等学校博士学科点专项科研基金(20130041110004) （20130041110004）
国家自然科学基金重点项目(51574057) （51574057）
中央高校基本科研业务费专项基金(DUT15QY07)Specialized Research Fund for the Doctoral Program of Higher Education(20130041110004) （DUT15QY07）
National Natural Sci-ence Foundation of China(51574057) （51574057）
Fundamental Research Funds for the Central Universities(DUT15QY07) （DUT15QY07）
