传感技术学报2017，Vol.30Issue(7)：996-1000,5.DOI:10.3969/j.issn.1004-1699.2017.07.004
基于CNTs/PDMS介电层的柔性压力传感特性研究
The Characteristics Study of the Flexible Pressure SensorBased on CNTs/PDMS Dielectric Layer
摘要
Abstract
A new method for MEMS technology of flexible pressure sensor is reported in this paper.The flexible pressure sensor mold are obtained by MEMS technology.The PDMS with"V"type Ag film parallel plate electrode was then made combining nano-imprinting technology,RF magnetron sputtering technique and PDMS mold.On the basis of the piezocapacitance effect of the CNTs/PDMSpolymersfilm,the capacitive pressure sensor was obtained.According to comparison test to the different size of pressure sensor,the developed sensor exhibits a maximum sensitivity of 3.98% kPa-1 to capacitance,great durability over 300 cycles.This technique cannot only realize batch preparation of wafer level flexible pressure sensor,but have a broad application prospect in the flexible pressure monitoring and electronic skin.关键词
柔性压力传感器/"V"型平行板电极/MEMS/PDMSKey words
flexible pressure sensor/"V"type parallel plate electrode/MEMS/PDMS分类
信息技术与安全科学引用本文复制引用
赵学峰,崔建利,高飞,张志东,闫树斌..基于CNTs/PDMS介电层的柔性压力传感特性研究[J].传感技术学报,2017,30(7):996-1000,5.基金项目
国家自然科学基金项目(61675185) （61675185）
国家杰出青年科学基金项目(61525107) （61525107）
山西省自然科学基金项目(201601D011008) （201601D011008）
河北省航天遥感信息处理与应用协同创新中心开放课题基金项目(67-Y20A07-9002-16/17) （67-Y20A07-9002-16/17）
