电子器件2017，Vol.40Issue(4)：983-986,4.DOI:10.3969/j.issn.1005-9490.2017.04.038
基于虚拟哥氏力的MEMS陀螺仪自标定方法及实验
Self-Calibration Method and Experiment of MEMSGyroscope Based on Virtual Coriolis Force
摘要
Abstract
A method of using a virtual Coriolis force calibrated silicon micromechanical gyroscope properties is proposed.By using a series of voltage signals to simulate the input of the Coriolis Force and angular velocity to obtain the frequency response characteristics of gyroscopes,this method can be used to measure the scale factor and other performance indicators of the gyroscope conveniently and efficiently in the open loop and closed loop mode.At the same time,the method can easily identify the dynamic response of the external angular velocity,increase the frequency range of the traditional calibration method,and avoid the performance limitation of the gyro.Furthermore,the method can also be applied to the error correction and fault detection of micro machined gyroscope.关键词
MEMS陀螺仪/虚拟哥氏力/自标定/标度因数/力平衡控制Key words
silicon micromachined gyroscope/virtual coriolis force/self-calibration/scale factor/force balance control分类
信息技术与安全科学引用本文复制引用
连树仁,曹慧亮,石云波,寇志伟,冯恒振,曾一笑..基于虚拟哥氏力的MEMS陀螺仪自标定方法及实验[J].电子器件,2017,40(4):983-986,4.基金项目
重点实验室开放基金项目(ZDSYSJ2015004) （ZDSYSJ2015004）
